Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays

Kerwin Wang, Karl F. Böhringer

研究成果: Conference contribution

3 引文 (Scopus)

摘要

This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

原文English
主出版物標題CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
主出版物子標題Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁數1
ISBN(電子)0780377664
DOIs
出版狀態Published - 2003 一月 1
事件5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
持續時間: 2003 十二月 152003 十二月 19

出版系列

名字Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
1

Other

Other5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
國家Taiwan
城市Taipei
期間03-12-1503-12-19

指紋

Plasma etching
plasma etching
numerical aperture
Etching
spacing
etching

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

引用此文

Wang, K., & Böhringer, K. F. (2003). Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. 於 CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1274774] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 卷 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274774
Wang, Kerwin ; Böhringer, Karl F. / Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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Wang, K & Böhringer, KF 2003, Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. 於 CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1274774, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 卷 1, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 03-12-15. https://doi.org/10.1109/CLEOPR.2003.1274774

Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. / Wang, Kerwin; Böhringer, Karl F.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1274774 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 卷 1).

研究成果: Conference contribution

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PY - 2003/1/1

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N2 - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

AB - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

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Wang K, Böhringer KF. Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. 於 CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1274774. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2003.1274774