The development of a portable line-shaping optical system for silicon surface treatment

Shih Feng Tseng, Wen Tse Hsiao, Han Chao Chang, Ming-Fei Chen

研究成果: Article

摘要

This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm2 line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.

原文English
頁(從 - 到)163-166
頁數4
期刊Optical Review
20
發行號2
DOIs
出版狀態Published - 2013 四月 3

指紋

surface treatment
silicon
profiles
semiconductor lasers
lenses
shapers
collimators
cleaning
laser beams
reflectance
lasers

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

引用此文

Tseng, Shih Feng ; Hsiao, Wen Tse ; Chang, Han Chao ; Chen, Ming-Fei. / The development of a portable line-shaping optical system for silicon surface treatment. 於: Optical Review. 2013 ; 卷 20, 編號 2. 頁 163-166.
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The development of a portable line-shaping optical system for silicon surface treatment. / Tseng, Shih Feng; Hsiao, Wen Tse; Chang, Han Chao; Chen, Ming-Fei.

於: Optical Review, 卷 20, 編號 2, 03.04.2013, p. 163-166.

研究成果: Article

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