Surface effect on dynamic characteristics of the electrostatically nano-beam actuator

研究成果: Article

3 引文 斯高帕斯(Scopus)

摘要

A nonlinear pull-in behavior analysis of a cantilever nano-actuator was carried out and an Euler-Bernoulli beam model was used in the examination of the fringing field and the surface and Casimir force effects in this study. In general, the analysis of an electrostatic device is difficult and usually complicated by nonlinear electrostatic forces and the Casimir force at the nanoscale. The nonlinear governing equation of a cantilever nano-beam can be solved using a hybrid computational scheme comprising differential transformation and finite difference to overcome the nonlinear electrostatic coupling phenomenon. The feasibility of the method presented here, as applied to the nonlinear electrostatic behavior of a cantilever nano-actuator, was analyzed. The numerical results for the pull-in voltage were found to be in good agreement with previously published results. The analysis showed that the surface effects had significant influence on the dynamic characteristics of the cantilever nano-actuator.

原文English
頁(從 - 到)284-290
頁數7
期刊Computers and Electrical Engineering
51
DOIs
出版狀態Published - 2016 四月 1

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Computer Science(all)
  • Electrical and Electronic Engineering

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