Stability and dynamic analysis of the electrostatic MEMS actuators

研究成果: Conference contribution

摘要

The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.

原文English
主出版物標題Applied Science and Precision Engineering Innovation
頁面431-435
頁數5
DOIs
出版狀態Published - 2014 一月 1
事件International Applied Science and Precision Engineering Conference 2013, ASPEC 2013 - NanTou, Taiwan
持續時間: 2013 十月 182013 十月 22

出版系列

名字Applied Mechanics and Materials
479-480
ISSN(列印)1660-9336
ISSN(電子)1662-7482

Other

OtherInternational Applied Science and Precision Engineering Conference 2013, ASPEC 2013
國家Taiwan
城市NanTou
期間13-10-1813-10-22

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • 引用此

    Liu, C-C. (2014). Stability and dynamic analysis of the electrostatic MEMS actuators. 於 Applied Science and Precision Engineering Innovation (頁 431-435). (Applied Mechanics and Materials; 卷 479-480). https://doi.org/10.4028/www.scientific.net/AMM.479-480.431