Robust tracking control of a novel piezodriven monolithic flexure-hinge stage

Yi Cheng Huang, Chih Hao Cheng

研究成果: Paper

11 引文 斯高帕斯(Scopus)

摘要

This study presents the controller design and tests of a piezo-driven system for precision motion of a novel two degree-of-freedom (DOF) monolithic stage. The computer-controlled system was developed, designed and employed for better displacement error compensation by PID controller based on Internal Model Control (IMC), Iterative Learning Control (ILC) and Disturbance Observer (DO). Experiments results shows that stage positioning is precisely controlled (error ≈ 1.42%) for tracking sinusoidal waveforms by IMC and P-type ILC with repeatable disturbance. With additional DO, experiment tests perform error ≈ 0.5% with non repeatable disturbance up to 16% of the maximum traveling length by in roughly 5 iterations. This is close to the hardware reproducibility level. Experimental results show the piezo-stage control system can be potentially used for nano technology applications for precision engineering in industrial systems.

原文English
頁面977-982
頁數6
出版狀態Published - 2004 十二月 1
事件2004 IEEE International Conference on Control Applications - Taipei, Taiwan
持續時間: 2004 九月 22004 九月 4

Other

Other2004 IEEE International Conference on Control Applications
國家Taiwan
城市Taipei
期間04-09-0204-09-04

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • 引用此

    Huang, Y. C., & Cheng, C. H. (2004). Robust tracking control of a novel piezodriven monolithic flexure-hinge stage. 977-982. 論文發表於 2004 IEEE International Conference on Control Applications, Taipei, Taiwan.