Research on an ultra-low power thermoelectric-type anemometer

研究成果: Conference article

摘要

Beyond the conventional hot-wire sensor, a new thermoelectric sensor with ultra-low power consumption without heating is proposed. Using the TSMC 0.35 um CMOS-MEMS process, the thermoelectric sensor is fabricated with 32 pair of central-symmetrical thermocouples positioned. When the fluid passes through the thermopile, the fluid will take away the heat, so that a temperature difference is generated between the cold end and hot end of the thermocouples. The temperature sensor is calibrated and senses the drop of temperature at the center of membrane during the measurement. For different flow velocities, it is interesting to find that the drop of temperature is verified by the output voltage of sensing circuit from thermopile and the same for temperature sensor which behaves as a function of flow velocity. The new approach for the anemometer of sensing flow velocity is realized by our proposed thermopile which is proved to be a practical technique with ultra-low power consumption.

原文English
文章編號012021
期刊IOP Conference Series: Materials Science and Engineering
383
發行號1
DOIs
出版狀態Published - 2018 七月 4
事件2018 International Joint Conference on Materials Science and Mechanical Engineering, CMSME 2018 - Bangkok, Thailand
持續時間: 2018 二月 242018 二月 26

指紋

Thermopiles
Anemometers
Thermoelectric power
Flow velocity
Temperature sensors
Thermocouples
Sensors
Electric power utilization
Fluids
Temperature
MEMS
Wire
Membranes
Heating
Networks (circuits)
Electric potential

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

引用此文

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abstract = "Beyond the conventional hot-wire sensor, a new thermoelectric sensor with ultra-low power consumption without heating is proposed. Using the TSMC 0.35 um CMOS-MEMS process, the thermoelectric sensor is fabricated with 32 pair of central-symmetrical thermocouples positioned. When the fluid passes through the thermopile, the fluid will take away the heat, so that a temperature difference is generated between the cold end and hot end of the thermocouples. The temperature sensor is calibrated and senses the drop of temperature at the center of membrane during the measurement. For different flow velocities, it is interesting to find that the drop of temperature is verified by the output voltage of sensing circuit from thermopile and the same for temperature sensor which behaves as a function of flow velocity. The new approach for the anemometer of sensing flow velocity is realized by our proposed thermopile which is proved to be a practical technique with ultra-low power consumption.",
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