Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit

Chih Hsiung Shen, Jianda Chen

研究成果: Conference contribution

摘要

In this research a new high resolution voltage-to-frequency type converter and measurement system for the differential signals of CMOS-MEMS sensor is proposed. In order to verify the feasibility of high resolution converting, a two-dimensional thermoelectric flow sensor with quadrant symmetrical structure was fabricated by using 2P4M 0.35μm CMOS-MEMS process of TSMC. The measurement circuit is designed by using Gated-Ring-Oscillator (GRO) structure to convert the output voltages of CMOS-MEMS sensor to the frequency signal. For the differential type signals, each output of two signals will be delivered to two GRO and each ring gives a corresponding oscillation frequency with small difference. Based on the heterodyne conversion architecture, after a low-pass filter, the output of mixed high frequency signals gives a low frequency with high-precision resolution of conversion. Beyond the traditional complex analog signal processing circuits, the proposed converter and measurement system gives a new approach to reach higher resolution highly-integration for the CMOS-MEMS sensor's applications.

原文English
主出版物標題Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018
編輯Artde Donald Kin-Tak Lam, Stephen D. Prior, Teen-Hang Meen
發行者Institute of Electrical and Electronics Engineers Inc.
頁面235-238
頁數4
ISBN(電子)9781538643426
DOIs
出版狀態Published - 2018 六月 22
事件4th IEEE International Conference on Applied System Innovation, ICASI 2018 - Chiba, Japan
持續時間: 2018 四月 132018 四月 17

出版系列

名字Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018

Other

Other4th IEEE International Conference on Applied System Innovation, ICASI 2018
國家Japan
城市Chiba
期間18-04-1318-04-17

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Hardware and Architecture
  • Energy Engineering and Power Technology
  • Control and Systems Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Modelling and Simulation
  • Biomedical Engineering

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