TY - GEN
T1 - Research on a novel integration chip of CMOS-MEMS sensor and differential GRO circuit
AU - Shen, Chih Hsiung
AU - Chen, Jianda
PY - 2018/6/22
Y1 - 2018/6/22
N2 - In this research a new high resolution voltage-to-frequency type converter and measurement system for the differential signals of CMOS-MEMS sensor is proposed. In order to verify the feasibility of high resolution converting, a two-dimensional thermoelectric flow sensor with quadrant symmetrical structure was fabricated by using 2P4M 0.35μm CMOS-MEMS process of TSMC. The measurement circuit is designed by using Gated-Ring-Oscillator (GRO) structure to convert the output voltages of CMOS-MEMS sensor to the frequency signal. For the differential type signals, each output of two signals will be delivered to two GRO and each ring gives a corresponding oscillation frequency with small difference. Based on the heterodyne conversion architecture, after a low-pass filter, the output of mixed high frequency signals gives a low frequency with high-precision resolution of conversion. Beyond the traditional complex analog signal processing circuits, the proposed converter and measurement system gives a new approach to reach higher resolution highly-integration for the CMOS-MEMS sensor's applications.
AB - In this research a new high resolution voltage-to-frequency type converter and measurement system for the differential signals of CMOS-MEMS sensor is proposed. In order to verify the feasibility of high resolution converting, a two-dimensional thermoelectric flow sensor with quadrant symmetrical structure was fabricated by using 2P4M 0.35μm CMOS-MEMS process of TSMC. The measurement circuit is designed by using Gated-Ring-Oscillator (GRO) structure to convert the output voltages of CMOS-MEMS sensor to the frequency signal. For the differential type signals, each output of two signals will be delivered to two GRO and each ring gives a corresponding oscillation frequency with small difference. Based on the heterodyne conversion architecture, after a low-pass filter, the output of mixed high frequency signals gives a low frequency with high-precision resolution of conversion. Beyond the traditional complex analog signal processing circuits, the proposed converter and measurement system gives a new approach to reach higher resolution highly-integration for the CMOS-MEMS sensor's applications.
UR - http://www.scopus.com/inward/record.url?scp=85050280653&partnerID=8YFLogxK
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U2 - 10.1109/ICASI.2018.8394576
DO - 10.1109/ICASI.2018.8394576
M3 - Conference contribution
AN - SCOPUS:85050280653
T3 - Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018
SP - 235
EP - 238
BT - Proceedings of 4th IEEE International Conference on Applied System Innovation 2018, ICASI 2018
A2 - Lam, Artde Donald Kin-Tak
A2 - Prior, Stephen D.
A2 - Meen, Teen-Hang
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 4th IEEE International Conference on Applied System Innovation, ICASI 2018
Y2 - 13 April 2018 through 17 April 2018
ER -