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Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating
Chih Hsiung Shen
,
Shu Jung Chen
, Shih Hao Lin
機電工程學系
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Chemical Compounds
Vacuum
Metals
Thermopiles
Heating
Thermocouples
Sensors
Heat convection
Polysilicon
Air
Electric potential
Convection
Molecules
Hot Temperature
MEMS
Membranes
Temperature
Engineering & Materials Science
Vacuum
Thermopiles
Heating
Metals
Thermocouples
Sensors
Heat convection
Polysilicon
Air
Electric potential
Convection
Molecules
Hot Temperature
MEMS
Membranes
Temperature