Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating

研究成果: Conference contribution

摘要

This paper proposes a new vacuum sensor with CMOS Metal-N-Poly thermoelectric materials which works for both thermoelectric sensing and resistive heating. A new method of vacuum measurement with self-heating is proposed based on the dual phases of heating and sensing for the same element which is realized with CMOS thermoelectric sensor. Using the TSMC 0.35 μm CMOS-MEMS process, the proposed thermoelectric sensor is designed and fabricated with standard CMOS materials of the 4th metal and N-polysilicon to form 64 pairs of central-symmetrical thermocouples. There is an air convection-sensing area at the center of membrane and is filled with array of micro-through-holes to enhance the effect of heat convection. When the air molecules move through the array of hole, the heat exchange will take away the heat to cause a temperature drop of sensing area which gives a weak voltage between the cold and hot end of the thermocouples. The heating of thermopile itself is designed at the first phase and sensing the output voltage at the second phase subsequently. According to a careful investigation of the measurement with a wide range of 10m∼10k torr, our proposed sensing scheme based on a thermoelectric type sensor is proved for practical vacuum detection and most of all it is proved as a new approach to use a commercial thermopile without heater, which is easier to include than a special custom design.

原文English
主出版物標題Applied Engineering, Materials and Mechanics II
編輯Jong Wan Hu
發行者Trans Tech Publications Ltd
頁面152-156
頁數5
ISBN(列印)9783035713374
DOIs
出版狀態Published - 2018 一月 1
事件3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018 - Okinawa Island, Japan
持續時間: 2018 四月 202018 四月 22

出版系列

名字Key Engineering Materials
773 KEM
ISSN(列印)1013-9826

Other

Other3rd International Conference on Applied Engineering, Materials and Mechanics, ICAEMM 2018
國家Japan
城市Okinawa Island
期間18-04-2018-04-22

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • 引用此

    Shen, C. H., Chen, S. J., & Lin, S. H. (2018). Research on a new metal-n-poly thermoelectric material sensor for vacuum sensing with self heating. 於 J. W. Hu (編輯), Applied Engineering, Materials and Mechanics II (頁 152-156). (Key Engineering Materials; 卷 773 KEM). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.773.152