Research on a highly sensitive magnetic-catalytic CMOS-MEMS compatible gas sensor

Chih Hsiung Shen, Shi Ching Ke

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)


This letter proposes a new magnetic-catalytic sensing mechanism designed to increase the sensitivity of a gas sensor with mesh-stacked sensing electrodes. Beyond the conventional power dissipation of heating to maintain a certain working temperature, the novel gas sensor with a magneticcatalytic mechanism operates at an ambient temperature, and heating power does not need to be considered. The standard 0.35 μm CMOS process was used to fabricate a gas sensor with mesh-stacked electrodes. To prepare the magnetic sensing material, a SnO2 solution, prepared using the sol-gel method, was mixed with Fe3O4 at a ratio of SnO2:Fe3O 4 = 3:1 and was deposited onto mesh-stacked electrodes. When the CO gas sensor was introduced, the sample was tested and verified inside a CO gas chamber using a magnetic field generator composed of solenoidal coils. According to a careful investigation of the measurement results, the highest sensitivity, 1.73%/ppm, was obtained under 12 G in a horizontal magnetic field, indicating that the mechanism is applicable for use in an ultralow power chemical microsensor with high sensitivity.

頁(從 - 到)120-122
期刊IEEE Electron Device Letters
出版狀態Published - 2014 一月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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