TY - JOUR
T1 - Research on a highly sensitive magnetic-catalytic CMOS-MEMS compatible gas sensor
AU - Shen, Chih Hsiung
AU - Ke, Shi Ching
PY - 2014/1/1
Y1 - 2014/1/1
N2 - This letter proposes a new magnetic-catalytic sensing mechanism designed to increase the sensitivity of a gas sensor with mesh-stacked sensing electrodes. Beyond the conventional power dissipation of heating to maintain a certain working temperature, the novel gas sensor with a magneticcatalytic mechanism operates at an ambient temperature, and heating power does not need to be considered. The standard 0.35 μm CMOS process was used to fabricate a gas sensor with mesh-stacked electrodes. To prepare the magnetic sensing material, a SnO2 solution, prepared using the sol-gel method, was mixed with Fe3O4 at a ratio of SnO2:Fe3O 4 = 3:1 and was deposited onto mesh-stacked electrodes. When the CO gas sensor was introduced, the sample was tested and verified inside a CO gas chamber using a magnetic field generator composed of solenoidal coils. According to a careful investigation of the measurement results, the highest sensitivity, 1.73%/ppm, was obtained under 12 G in a horizontal magnetic field, indicating that the mechanism is applicable for use in an ultralow power chemical microsensor with high sensitivity.
AB - This letter proposes a new magnetic-catalytic sensing mechanism designed to increase the sensitivity of a gas sensor with mesh-stacked sensing electrodes. Beyond the conventional power dissipation of heating to maintain a certain working temperature, the novel gas sensor with a magneticcatalytic mechanism operates at an ambient temperature, and heating power does not need to be considered. The standard 0.35 μm CMOS process was used to fabricate a gas sensor with mesh-stacked electrodes. To prepare the magnetic sensing material, a SnO2 solution, prepared using the sol-gel method, was mixed with Fe3O4 at a ratio of SnO2:Fe3O 4 = 3:1 and was deposited onto mesh-stacked electrodes. When the CO gas sensor was introduced, the sample was tested and verified inside a CO gas chamber using a magnetic field generator composed of solenoidal coils. According to a careful investigation of the measurement results, the highest sensitivity, 1.73%/ppm, was obtained under 12 G in a horizontal magnetic field, indicating that the mechanism is applicable for use in an ultralow power chemical microsensor with high sensitivity.
UR - http://www.scopus.com/inward/record.url?scp=84891519558&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891519558&partnerID=8YFLogxK
U2 - 10.1109/LED.2013.2291771
DO - 10.1109/LED.2013.2291771
M3 - Article
AN - SCOPUS:84891519558
VL - 35
SP - 120
EP - 122
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
SN - 0741-3106
IS - 1
M1 - 6679259
ER -