Phase separation phenomenon in MOCVD-grown GaInP epitaxial layers

Yu Li Tsai, Ray Hua Horng, Ming Chun Tseng, Chia hao Kuo, Po Liang Liu, Dong Sing Wuu, Der Yuh Lin

研究成果: Article

8 引文 斯高帕斯(Scopus)


In-rich and Ga-rich GaInP films were intentionally grown on (0 0 1) GaAs substrates by low-pressure MOCVD to investigate the effect of lattice strain on composition. High-resolution X-ray diffraction (HRXRD) measurement showed that a GaInP single layer exhibits a double-diffracted peak phenomenon. Such a double peak represents a composition separation in the grown film, resulting in two absorption cutoff energies in optical absorption analysis. Cross-sectional transmission electron microscopic (TEM) observation confirmed the composition separation in an In-rich GaInP film. Furthermore, the composition separation amount of a Ga-rich GaInP film after substrate removal was found to be ∼0.5%, which reflects the actual effect of lattice strain on composition during growth stage. Crown

頁(從 - 到)3220-3224
期刊Journal of Crystal Growth
出版狀態Published - 2009 五月 15


All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


Tsai, Y. L., Horng, R. H., Tseng, M. C., Kuo, C. H., Liu, P. L., Wuu, D. S., & Lin, D. Y. (2009). Phase separation phenomenon in MOCVD-grown GaInP epitaxial layers. Journal of Crystal Growth, 311(11), 3220-3224.