Parameters optimization of laser electrode patterning on ITO/glass using multi-performance characteristics analysis

Chih Chung Yang, Wen Tse Hsiao, Chien Kai Chung, Shih Feng Tseng, Kuo Cheng Huang, Ming Fei Chen

研究成果: Conference contribution

摘要

The objective of this study was to obtain the optimal parameters for laser electrode patterning of indium-tinoxide (ITO) films coated on soda lime glass substrates; the parameters were determined through grey relational analysis. The electrode patterning parameters affecting the sheet resistance and optical transmittance of the film include the laser power, pulse repetition frequency, pulse duration, and focus point position. Multiple performance characteristics associated with the sheet resistance and optical transmittance were investigated by conducting experiments. An infrared (1064 nm) laser system was used to directly fabricate electrode patterns on ITO films, and the characteristics of the patterned films were systematically analyzed using an ultraviolet-visible-near-infrared spectrophotometer and a four-point probe instrument. The data obtained from the experiments were analyzed to optimize the laser patterning parameters correlated with multiple performance characteristics.

原文English
主出版物標題Proceedings - 2016 IEEE International Conference on Industrial Technology, ICIT 2016
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1818-1822
頁數5
ISBN(電子)9781467380751
DOIs
出版狀態Published - 2016 五月 19
事件IEEE International Conference on Industrial Technology, ICIT 2016 - Taipei, Taiwan
持續時間: 2016 三月 142016 三月 17

出版系列

名字Proceedings of the IEEE International Conference on Industrial Technology
2016-May

Other

OtherIEEE International Conference on Industrial Technology, ICIT 2016
國家Taiwan
城市Taipei
期間16-03-1416-03-17

All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering

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