Nonlinear dynamic analysis of micro cantilever beam under electrostatic loading

研究成果: Article

13 引文 (Scopus)

摘要

A hybrid differential transformation / finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro cantilever beam which high aspect ratios (length/width). The validity of the proposed method is confirmed by comparing the numerical results obtained for the tip displacement and pull-in voltage of the cantilever beam with the analytical and experimental results presented in the literature. The hybrid scheme is then applied to analyze both the steady-state and the dynamic deflection behavior of the cantilever beam as a function of the applied voltage. Overall, the results confirm that the hybrid method provides an accurate and computationally- efficient means of analyzing the complex nonlinear behavior of both the current micro cantilever beam system and other micro-scale electrostatically-actuated structures.

原文English
頁(從 - 到)63-70
頁數8
期刊Journal of Mechanics
28
發行號1
DOIs
出版狀態Published - 2012 三月 1

指紋

Cantilever Beam
cantilever beams
Cantilever beams
Nonlinear Analysis
Dynamic Analysis
Electrostatics
Dynamic analysis
Nonlinear Dynamics
electrostatics
Voltage
Deflection (structures)
Electric potential
electric potential
high aspect ratio
Hybrid Method
Finite Difference Scheme
Aspect Ratio
Deflection
Aspect ratio
deflection

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanical Engineering
  • Applied Mathematics

引用此文

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AB - A hybrid differential transformation / finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro cantilever beam which high aspect ratios (length/width). The validity of the proposed method is confirmed by comparing the numerical results obtained for the tip displacement and pull-in voltage of the cantilever beam with the analytical and experimental results presented in the literature. The hybrid scheme is then applied to analyze both the steady-state and the dynamic deflection behavior of the cantilever beam as a function of the applied voltage. Overall, the results confirm that the hybrid method provides an accurate and computationally- efficient means of analyzing the complex nonlinear behavior of both the current micro cantilever beam system and other micro-scale electrostatically-actuated structures.

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