New groove structures for miniature quartz crystal microbalance with low crystal impedance

Zong Han Liu, Chih-Hsiung Shen

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

Throughout the world, there are numerous of studies on quartz crystal microbalance (QCM). Today, we come up with a new way to reduce both the size of QCM structure and the crystal impedance without lowering the sensitivity. Beyond the conventional design of QCM originally developed in recent years, a new disk shape with multi-groove structures is proposed and investigated thoroughly to realize the miniaturized QCM. Along the miniaturization stage, there are two main approaches to remain the efficiency of vibration. One is to improve the piezoelectric effect which can be further increased by reducing the distance of electric field and the other is to improve the effective area of electric potential flow between the electrodes. Several proposed design with grooves in the disk has been proposed to make effective area larger, crystal impedance lower,and Q value higher. We will investigate between different groove structures on QCM under the same bias voltage. In this study, we propose and verify the innovative design of QCM and a thorough investigation of the electric and mechanical response were performed with evidence marvelous efficiency. Consequently, the three groove structure gives the best piezoelectric performance than the other.

原文English
主出版物標題Materials Processing Technology II
頁面2461-2465
頁數5
DOIs
出版狀態Published - 2012 十一月 9
事件2nd International Conference on Advanced Engineering Materials and Technology, AEMT 2012 - Zhuhai, China
持續時間: 2012 七月 62012 七月 8

出版系列

名字Advanced Materials Research
538-541
ISSN(列印)1022-6680

Other

Other2nd International Conference on Advanced Engineering Materials and Technology, AEMT 2012
國家China
城市Zhuhai
期間12-07-0612-07-08

    指紋

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此

Liu, Z. H., & Shen, C-H. (2012). New groove structures for miniature quartz crystal microbalance with low crystal impedance. 於 Materials Processing Technology II (頁 2461-2465). (Advanced Materials Research; 卷 538-541). https://doi.org/10.4028/www.scientific.net/AMR.538-541.2461