The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.
|主出版物標題||Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation|
|出版狀態||Published - 2004 十二月 1|
|事件||Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation - Chengdu, China|
持續時間: 2004 八月 26 → 2004 八月 31
|Other||Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation|
|期間||04-08-26 → 04-08-31|
All Science Journal Classification (ASJC) codes