Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang, Mou Sheng Lin, Che Ming Liu, Jyh Chen Chen

研究成果: Conference contribution

摘要

The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.

原文English
主出版物標題Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation
頁面793-798
頁數6
出版狀態Published - 2004 十二月 1
事件Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation - Chengdu, China
持續時間: 2004 八月 262004 八月 31

Other

OtherProceedings - 2004 International Conference on Intelligent Mechatronics and Automation
國家China
城市Chengdu
期間04-08-2604-08-31

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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