In the present study, the hybrid differential transformation and finite difference method is applied to analyze the dynamic behavior of the nonlinear micro-electromechanical circular plate actuated by combined DC / AC loading schemes. The analysis takes account of the axial residual stress and hydrostatic pressure acting on micro circular plate upper surface. The dynamic response of the plate as a function of the magnitude of the AC driving voltage is explored. Moreover, the effect of the initial gap height on the pull-in voltage of the plate is systematically explored.
All Science Journal Classification (ASJC) codes
- Chemistry (miscellaneous)
- Modelling and Simulation
- Energy (miscellaneous)
- Fluid Flow and Transfer Processes
- Computer Networks and Communications
- Computational Mathematics