Measurement of small angle based on a (1 0 0) silicon wafer and heterodyne interferometer

Meng Chang Hsieh, Jiun-You Lin, Yu Fong Chen, Chia Ou Chang

研究成果: Article

2 引文 (Scopus)

摘要

In this paper, a new optical material application and a heterodyne interferometer are proposed for measuring small angles. In the proposed interferometer, the optical material is a (1 0 0) silicon wafer applied to compose a new architecture of small angle sensor. The small angle measurement used the phase difference which is dependent on the incident angle at the silicon wafer surface to deduce the angular variation. The proposed architecture is simple and uses the common path method to compare test and reference signals; thus, small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. The angular resolution and sensitivity levels superior to 7 × 10−5° (1.3 × 10−6 rad) and 150 (deg/deg), respectively, were attainable in a dynamic range of 0.45°.

原文English
頁(從 - 到)487-491
頁數5
期刊Optical Review
23
發行號3
DOIs
出版狀態Published - 2016 六月 1

指紋

interferometers
wafers
silicon
optical materials
angular resolution
dynamic range
estimating
sensitivity
sensors

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

引用此文

Hsieh, Meng Chang ; Lin, Jiun-You ; Chen, Yu Fong ; Chang, Chia Ou. / Measurement of small angle based on a (1 0 0) silicon wafer and heterodyne interferometer. 於: Optical Review. 2016 ; 卷 23, 編號 3. 頁 487-491.
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Measurement of small angle based on a (1 0 0) silicon wafer and heterodyne interferometer. / Hsieh, Meng Chang; Lin, Jiun-You; Chen, Yu Fong; Chang, Chia Ou.

於: Optical Review, 卷 23, 編號 3, 01.06.2016, p. 487-491.

研究成果: Article

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