TY - GEN
T1 - Low temperature molding for high space coverage microlens arrays
AU - Wang, Kerwin
AU - Böhringer, Karl F.
PY - 2005/12/1
Y1 - 2005/12/1
N2 - This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.
AB - This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.
UR - http://www.scopus.com/inward/record.url?scp=33847110334&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847110334&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2005.1569726
DO - 10.1109/CLEOPR.2005.1569726
M3 - Conference contribution
AN - SCOPUS:33847110334
SN - 0780392426
SN - 9780780392427
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
SP - 1291
EP - 1292
BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
T2 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Y2 - 11 July 2005 through 15 July 2005
ER -