Low temperature molding for high space coverage microlens arrays

Kerwin Wang; Karl F. Böhringer

doi:10.1109/CLEOPR.2005.1569726

Low temperature molding for high space coverage microlens arrays

Kerwin Wang, Karl F. Böhringer

機電工程學系

研究成果: Conference contribution

1 引文斯高帕斯（Scopus）

摘要

This paper presents SF₆/O₂ plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.

原文	English
主出版物標題	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
頁面	1291-1292
頁數	2
DOIs	https://doi.org/10.1109/CLEOPR.2005.1569726
出版狀態	Published - 2005 十二月 1
事件	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, Japan 持續時間: 2005 七月 11 → 2005 七月 15

出版系列

名字	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
卷	2005

Other

Other	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
國家	Japan
城市	Tokyo
期間	05-07-11 → 05-07-15

指紋

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

引用此

Wang, K., & Böhringer, K. F. (2005). Low temperature molding for high space coverage microlens arrays. 於 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 (頁 1291-1292). [1569726] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 卷 2005). https://doi.org/10.1109/CLEOPR.2005.1569726

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title = "Low temperature molding for high space coverage microlens arrays",

abstract = "This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.",

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Wang, K & Böhringer, KF 2005, Low temperature molding for high space coverage microlens arrays. 於 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005., 1569726, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 卷 2005, 頁 1291-1292, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005, Tokyo, Japan, 05-07-11. https://doi.org/10.1109/CLEOPR.2005.1569726

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AB - This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.

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T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

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存取文件

10.1109/CLEOPR.2005.1569726