Low temperature molding for high space coverage microlens arrays

Kerwin Wang, Karl F. Böhringer

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.

原文English
主出版物標題Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
頁面1291-1292
頁數2
DOIs
出版狀態Published - 2005 十二月 1
事件Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, Japan
持續時間: 2005 七月 112005 七月 15

出版系列

名字Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
2005

Other

OtherPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
國家Japan
城市Tokyo
期間05-07-1105-07-15

    指紋

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

引用此

Wang, K., & Böhringer, K. F. (2005). Low temperature molding for high space coverage microlens arrays. 於 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 (頁 1291-1292). [1569726] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 卷 2005). https://doi.org/10.1109/CLEOPR.2005.1569726