Investigation of thermal type microsensor with infrared photonic crystal

Po Hao Hsu, Meng Hung Tsai, Chih-Hsiung Shen, Shu Jung Chen

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

In this paper we have proposed a new complementary metal-oxide- semiconductor (CMOS) thermopile by leading the infrared photonic crystal (IPC) to increase the absorption of infrared radiation. A highly sensitive infrared detector requires an excellent signal induced by incident IR radiation to maximize the temperature change. A photonic crystal structure offers significantly effects of optical performance, especially for the absorption and emitting of radiation. Firstly we develop such a structure of thermopile with high performance by using 0.35μm 2P4M CMOS IC compatible process which can be easily and exactly fabricated. Several designs of infrared microsensors are proposed to study influential parameters from the photonic crystal structure. The measurement results show these devices get greatly responses higher than the thermopile without infrared photonic crystal. To that end, the investigation of field of view for our proposed thermopile is acquired, and the results show no significant difference between the thermopiles with or without PC. Our design is proved to be adequate for commercial batch production.

原文English
主出版物標題IEEE Sensors 2010 Conference, SENSORS 2010
頁面829-832
頁數4
DOIs
出版狀態Published - 2010 十二月 1
事件9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
持續時間: 2010 十一月 12010 十一月 4

出版系列

名字Proceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
國家United States
城市Waikoloa, HI
期間10-11-0110-11-04

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • 引用此

    Hsu, P. H., Tsai, M. H., Shen, C-H., & Chen, S. J. (2010). Investigation of thermal type microsensor with infrared photonic crystal. 於 IEEE Sensors 2010 Conference, SENSORS 2010 (頁 829-832). [5691008] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5691008