In-situ monitoring of thickness of quartz membrane during batch chemical etching using a novel micromachined acoustic wave sensor

Chi Yuan Lee, Tsung Tsong Wu, Yung Yu Chen, Shih Yung Pao, Wen Jong Chen, Ying Chou Cheng, Pei Zen Chang, Ping Hei Chen, Chih Kung Lee, Ching Liang Dai, Lung Jieh Yang, Kaih Siang Yen, Fu Yuan Xiao, Chih Wei Liu, Shui Shong Lu

研究成果: Conference article同行評審

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Engineering & Materials Science