Highly sensitive magnetic-catalytic gas sensor

研究成果: Conference contribution

摘要

Magnetic-catalyzed SnO2 with Fe3O4 of CMOS MEMS gas sensor is proposed and it's based on the magnetic-catalytic sensing mechanism to increase sensitivity. Beyond the conventional power dissipation of heating to maintain a certain working temperature, a new approach for gas sensor with magnetic-catalytic mechanism works at the ambient temperature without the consideration of active heating. The design and fabrication is realized by the standard 0.35μm CMOS process to fabricate a gas sensor with mesh stacked electrodes. For the preparation of magnetic sensing material, a prepared solution of sol-gel SnO2 is mixed at SnO2:Fe 3O4 = 3:1, which was deposited onto mesh stacked electrodes. When the CO gas sensor is introduced, the sample is tested and verified inside a CO gas chamber with a magnetic field generator of solenoid coil. We also build a magnetic-catalytic gas reaction behavior description based on Gibbs free energy and the Eyring equation. A careful investigation of measurement results, at horizontal magnetic field, the sensitivity of proposed CO gas sensor reaches 1.73%/ppm under the 12 Gauss which shows widely applicable for an ultra-low power chemical microsensor with high sensitivity.

原文English
主出版物標題2013 7th International Conference on Sensing Technology, ICST 2013
頁面419-423
頁數5
DOIs
出版狀態Published - 2013 十二月 1
事件2013 7th International Conference on Sensing Technology, ICST 2013 - Wellington, New Zealand
持續時間: 2013 十二月 32013 十二月 5

出版系列

名字Proceedings of the International Conference on Sensing Technology, ICST
ISSN(列印)2156-8065
ISSN(電子)2156-8073

Other

Other2013 7th International Conference on Sensing Technology, ICST 2013
國家New Zealand
城市Wellington
期間13-12-0313-12-05

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Science Applications
  • Signal Processing
  • Electrical and Electronic Engineering

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