High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system

Wen Tse Hsiao, Shih Feng Tseng, Donyau Chiang, Kuo Cheng Huang, Ming Fei Chen

研究成果: Conference contribution

摘要

Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.

原文English
主出版物標題2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings
頁面250-253
頁數4
DOIs
出版狀態Published - 2011 八月 25
事件2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Binjiang, Hangzhou, China
持續時間: 2011 五月 102011 五月 12

出版系列

名字Conference Record - IEEE Instrumentation and Measurement Technology Conference
ISSN(列印)1091-5281

Other

Other2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011
國家China
城市Binjiang, Hangzhou
期間11-05-1011-05-12

    指紋

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

引用此

Hsiao, W. T., Tseng, S. F., Chiang, D., Huang, K. C., & Chen, M. F. (2011). High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system. 於 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings (頁 250-253). [5944028] (Conference Record - IEEE Instrumentation and Measurement Technology Conference). https://doi.org/10.1109/IMTC.2011.5944028