Fiber laser driven EUV generation

Yu Chung Chang, Aghapi Mordovanakis, Kai Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas

研究成果: Conference contribution

摘要

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

原文English
主出版物標題2005 Conference on Lasers and Electro-Optics, CLEO
頁面2200-2202
頁數3
出版狀態Published - 2005 十二月 1
事件2005 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, United States
持續時間: 2005 五月 222005 五月 27

出版系列

名字2005 Conference on Lasers and Electro-Optics, CLEO
3

Other

Other2005 Conference on Lasers and Electro-Optics, CLEO
國家United States
城市Baltimore, MD
期間05-05-2205-05-27

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • 引用此

    Chang, Y. C., Mordovanakis, A., Hou, K. C., Nees, J., Hou, B., Maksimchuk, A., Mourou, G., & Galvanauskas, A. (2005). Fiber laser driven EUV generation. 於 2005 Conference on Lasers and Electro-Optics, CLEO (頁 2200-2202). [CFH6] (2005 Conference on Lasers and Electro-Optics, CLEO; 卷 3).