Experimental verification of phononic crystal slab based silicon microresonators

Nan Wang, Min Tang, Fu Li Hsiao, Chong Pei Ho, Moorthi Palaniapan, Dim Lee Kwong, Chengkuo Lee

研究成果: Conference contribution

摘要

This paper reports experimentally measured data of two microfabricated resonators, namely a Fabry-Perot (FP) resonator and a reduced central-hole (RCH) resonator, formed by engineering different defects on an otherwise perfect phononic crystal (PnC) slab. Experimental results, which are well supported by the numerically simulated data, show that the RCH resonator has higher Q factor, higher resonant frequency and lower insertion loss than the FP resonator. Finite-element-modelling (FEM) analysed steady-state displacement profiles of the two resonators show that the higher Q factor obtained by the RCH resonator is caused by its superior ability of the energy confinement within the defected region.

原文English
主出版物標題Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
頁面131-132
頁數2
DOIs
出版狀態Published - 2013 十二月 1
事件2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
持續時間: 2013 八月 182013 八月 22

出版系列

名字International Conference on Optical MEMS and Nanophotonics
ISSN(列印)2160-5033
ISSN(電子)2160-5041

Other

Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
國家Japan
城市Kanazawa
期間13-08-1813-08-22

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • 引用此

    Wang, N., Tang, M., Hsiao, F. L., Ho, C. P., Palaniapan, M., Kwong, D. L., & Lee, C. (2013). Experimental verification of phononic crystal slab based silicon microresonators. 於 Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (頁 131-132). [6659094] (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2013.6659094