Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate

Nan Wang, J. M. Tsai, B. W. Soon, Dim Lee Kwong, Fu Li Hsiao, Moorthi Palaniapan, Chengkuo Lee

研究成果: Conference contribution

1 引文 (Scopus)

摘要

This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications.

原文English
主出版物標題2011 Defense Science Research Conference and Expo, DSR 2011
DOIs
出版狀態Published - 2011 十月 13
事件2011 Defense Science Research Conference and Expo, DSR 2011 - Singapore, Singapore
持續時間: 2011 八月 32011 八月 5

出版系列

名字2011 Defense Science Research Conference and Expo, DSR 2011

Other

Other2011 Defense Science Research Conference and Expo, DSR 2011
國家Singapore
城市Singapore
期間11-08-0311-08-05

指紋

acoustics
air
simulation
performance

All Science Journal Classification (ASJC) codes

  • Law

引用此文

Wang, N., Tsai, J. M., Soon, B. W., Kwong, D. L., Hsiao, F. L., Palaniapan, M., & Lee, C. (2011). Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate. 於 2011 Defense Science Research Conference and Expo, DSR 2011 [6026876] (2011 Defense Science Research Conference and Expo, DSR 2011). https://doi.org/10.1109/DSR.2011.6026876
Wang, Nan ; Tsai, J. M. ; Soon, B. W. ; Kwong, Dim Lee ; Hsiao, Fu Li ; Palaniapan, Moorthi ; Lee, Chengkuo. / Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate. 2011 Defense Science Research Conference and Expo, DSR 2011. 2011. (2011 Defense Science Research Conference and Expo, DSR 2011).
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title = "Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate",
abstract = "This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications.",
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Wang, N, Tsai, JM, Soon, BW, Kwong, DL, Hsiao, FL, Palaniapan, M & Lee, C 2011, Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate. 於 2011 Defense Science Research Conference and Expo, DSR 2011., 6026876, 2011 Defense Science Research Conference and Expo, DSR 2011, 2011 Defense Science Research Conference and Expo, DSR 2011, Singapore, Singapore, 11-08-03. https://doi.org/10.1109/DSR.2011.6026876

Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate. / Wang, Nan; Tsai, J. M.; Soon, B. W.; Kwong, Dim Lee; Hsiao, Fu Li; Palaniapan, Moorthi; Lee, Chengkuo.

2011 Defense Science Research Conference and Expo, DSR 2011. 2011. 6026876 (2011 Defense Science Research Conference and Expo, DSR 2011).

研究成果: Conference contribution

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AU - Wang, Nan

AU - Tsai, J. M.

AU - Soon, B. W.

AU - Kwong, Dim Lee

AU - Hsiao, Fu Li

AU - Palaniapan, Moorthi

AU - Lee, Chengkuo

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N2 - This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications.

AB - This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications.

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Wang N, Tsai JM, Soon BW, Kwong DL, Hsiao FL, Palaniapan M 等. Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate. 於 2011 Defense Science Research Conference and Expo, DSR 2011. 2011. 6026876. (2011 Defense Science Research Conference and Expo, DSR 2011). https://doi.org/10.1109/DSR.2011.6026876