Effects of substrate temperature on the microstructure and properties of Al-doped ZnO thin films by DC magnetron sputtering from AZOY® target

Pin Chuan Yao, Shih Tse Hang, Menq Jiun Wu

研究成果: Conference contribution

摘要

Transparent conducting Al-doped ZnO (AZO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering with a sintered ceramic target, AZOY® that contains a small amount of Y2O3 in addition to Al2O3 and ZnO. The effect of substrate temperatures (Ts) on the structural, electrical and optical properties of the prepared AZO films was evaluated extensively. By elevating Ts, the electrical conductivity of the films could be effectively improved from 1.68 ×10-3 Ω{dot operator}cm (no substrates heating) to a minimum resistivity of 4.62×10-4 Ω{dot operator}cm at Ts = 400°C with an average visible transmittance (400~800nm) of ~80%. It revealed that substrate heating is closely related to the crystallinity and the surface roughness of the deposited films. It is noteworthy that the transmittance in the NIR region was also improved considerably as compared to those using alloy targets by reactive magnetron sputtering and even slightly higher than those using Al-doped ZnO (1 wt.%) ceramic targets by RF sputtering.

原文English
主出版物標題Innovation for Applied Science and Technology
頁面108-112
頁數5
DOIs
出版狀態Published - 2013 二月 20
事件2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
持續時間: 2012 十一月 22012 十一月 6

出版系列

名字Applied Mechanics and Materials
284-287
ISSN(列印)1660-9336
ISSN(電子)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
國家Taiwan
城市Kaohsiung
期間12-11-0212-11-06

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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