Effects of KrF excimer laser irradiation on surface work function of indium-tin-oxide

Yow Jon Lin, Yao Ming Chen, Yung Chi Wang

研究成果: Article

14 引文 斯高帕斯(Scopus)

摘要

In this study, the effects of a KrF excimer laser irradiation on the surface work function (SWF) of indium-tin-oxide (ITO) have been investigated. From the observed x-ray photoelectron spectroscopy results, optical transmittance measurements, and four-point probe measurements, it is suggested that the surface chemical changes, the reduction of the carrier concentration, and an increase in the sheet resistance had strong effects on the SWF of ITO. We find that the (O2) 2- occupation of oxygen vacancies (VO 2+) near the ITO surface after laser irradiation induced a peroxidic ITO surface, increasing the SWF.

原文English
文章編號083702
期刊Journal of Applied Physics
97
發行號8
DOIs
出版狀態Published - 2005 四月 27

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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