Edge isolation of transparent conductive polymer (TCP) thin films on flexible substrates using UV laser ablation

Wen Tse Hsiao, Shih Feng Tseng, Kuo Cheng Huang, Donyau Chiang, Ming Fei Chen

研究成果: Article

2 引文 斯高帕斯(Scopus)

摘要

The purpose of this study was to directly use the writing techniques for the complex electrode edge isolation of transparent conductive polymer (TCP) thin films by a nanosecond pulsed UV laser processing system. The processing parameters including the laser pulse energy, the pulse repetition frequency, and the scan speed of galvanometers were examined to ablate the TCP films deposited on polyethylene terephtalate substrates of 188μm thick. The thickness of TCP films was approximately 20 nm. The laser pulse repetition frequency and the scan speed of galvanometers were applied to calculate the overlapping rate of laser spots and to discuss the patterning region quality. Surface morphology, edge quality, and width and depth of edge isolated patterning structures after laser ablation process were measured by a three-dimensional confocal laser scanning microscope. In addition, the electrical conductivity of ablated TCP films was measured by a four-point probes instrument. After isolated line patterning was formed, the ablated TCP films with a better edge quality were obtained directly when the overlapping rate of laser spots, the scan speed, and the pulse repetition rate were 83.3%, 200 mm/s, and 40 kHz, respectively. The better surface morphology of electrode pattern structures was also obtained when the scan speed and the pulse repetition rate were 500 mm/s and 40 kHz, respectively.

原文English
頁(從 - 到)4905-4910
頁數6
期刊Journal of Nanoscience and Nanotechnology
12
發行號6
DOIs
出版狀態Published - 2012 七月 23

    指紋

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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