Development and traceability of a multi-functional microscope

Wen Jong Chen, Chih Kung Lee, Shui Shong Lua, Yu Jena Chang, Yu Chiaa Chang, Chi Yuana Chang, Shuen Chen Shiue, Shu Sheng Lee, Huay Chung Liou

研究成果: Conference article同行評審

摘要

A multi-functional microscope named Morphininscope, which was designed to switch between various measurement functions by simply rotating its turret or turning on some sub-systems, was presented. Some of the various built-in functions of this microscope, including a confocal microscope, a photon-tunneling microscope, a laser based phase-shifting interferometry microscope, a Linnik interference microscope, and an ellipsometer, etc. are examined. The opportunity to bring traceability to thin-film or nano-materials metrology, which is an issue under extensive investigations now, offered by the multi-functional microscope were also detailed. Design thinking, optical and opto-mechanical configurations adopted, and experimental results of this newly multi-functional microscope were examined. Measurement of a grating surface, the real and the imaginary complex refractive indices, and the corrected surface profile of an inhomogeneous specimen were used to demonstrate the performance and advantages of this type of multi-functional microscope. Potential to achieve and transfer traceability of the primary standard in Morphinscope was also discussed.

原文English
頁(從 - 到)207-216
頁數10
期刊Proceedings of SPIE - The International Society for Optical Engineering
4401
DOIs
出版狀態Published - 2001
事件Recent Developments in Traceable Dimensional Measurement - Munich, Germany
持續時間: 2001 六月 202001 六月 21

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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