Design and performance evaluation of a multi-functional microscopy

Wen Jong Chen, Chih Kung Lee, Shui Shong Lu

研究成果: Chapter

摘要

An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.

原文English
主出版物標題Multi-Modality Microscopy
發行者World Scientific Publishing Co.
頁面178-187
頁數10
ISBN(電子)9789812774620
ISBN(列印)9812565337, 9789812565334
DOIs
出版狀態Published - 2006 一月 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)

指紋 深入研究「Design and performance evaluation of a multi-functional microscopy」主題。共同形成了獨特的指紋。

  • 引用此

    Chen, W. J., Lee, C. K., & Lu, S. S. (2006). Design and performance evaluation of a multi-functional microscopy. 於 Multi-Modality Microscopy (頁 178-187). World Scientific Publishing Co.. https://doi.org/10.1142/9789812774620_0007