摘要
We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.
| 原文 | English |
|---|---|
| 文章編號 | 085110 |
| 期刊 | Review of Scientific Instruments |
| 卷 | 83 |
| 發行號 | 8 |
| DOIs | |
| 出版狀態 | Published - 2012 八月 1 |
指紋
All Science Journal Classification (ASJC) codes
- Instrumentation
引用此文
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Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system. / Wu, Jenq-Shinn; Huang, Y. K.; Wu, F. L.; Lin, Der-Yuh.
於: Review of Scientific Instruments, 卷 83, 編號 8, 085110, 01.08.2012.研究成果: Review article
TY - JOUR
T1 - Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system
AU - Wu, Jenq-Shinn
AU - Huang, Y. K.
AU - Wu, F. L.
AU - Lin, Der-Yuh
PY - 2012/8/1
Y1 - 2012/8/1
N2 - We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.
AB - We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.
UR - http://www.scopus.com/inward/record.url?scp=84865787481&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84865787481&partnerID=8YFLogxK
U2 - 10.1063/1.4746769
DO - 10.1063/1.4746769
M3 - Review article
C2 - 22938335
AN - SCOPUS:84865787481
VL - 83
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
SN - 0034-6748
IS - 8
M1 - 085110
ER -