Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system

Jenq-Shinn Wu, Y. K. Huang, F. L. Wu, Der-Yuh Lin

研究成果: Review article

1 引文 (Scopus)

摘要

We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.

原文English
文章編號085110
期刊Review of Scientific Instruments
83
發行號8
DOIs
出版狀態Published - 2012 八月 1

指紋

coefficients
Piezoelectric ceramics
piezoelectric ceramics
sensors
Sensors
pressing
Thin films
thin films

All Science Journal Classification (ASJC) codes

  • Instrumentation

引用此文

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