Dependence of resonant wavelength and mechanical deformation of photonic crystal cantilever integrated with dual nano-ring resonator

Bo Li; Fu Li Hsiao; Chengkou Lee

doi:10.1109/PGC.2010.5705971

Dependence of resonant wavelength and mechanical deformation of photonic crystal cantilever integrated with dual nano-ring resonator

Bo Li, Fu Li Hsiao, Chengkou Lee

光電科技研究所

研究成果: Conference contribution

摘要

We investigated photonic crystals based dual nano-ring channel drop filters which are nanomechanically tunable. The backward channel drop mechanism is explained by a proposed model. Resonant peak observed on the free stand device is located 1553.6 nm with quality factor better than 3800 at backward drop port. When this dual nano-ring is integrated at the junction between silicon cantilever and substrate, the deformation of silicon cantilever can shift the filter resonant wavelength. The 1nm wavelength shift is derived by minimum tuning force of 370nN.

原文	English
主出版物標題	2010 Photonics Global Conference, PGC 2010
DOIs	https://doi.org/10.1109/PGC.2010.5705971
出版狀態	Published - 2010 十二月 1
事件	2010 Photonics Global Conference, PGC 2010 - Orchard, Singapore 持續時間: 2010 十二月 14 → 2010 十二月 16

出版系列

名字	2010 Photonics Global Conference, PGC 2010

Other

Other	2010 Photonics Global Conference, PGC 2010
國家	Singapore
城市	Orchard
期間	10-12-14 → 10-12-16

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mathematical Physics
Atomic and Molecular Physics, and Optics

存取文件

10.1109/PGC.2010.5705971

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引用此

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abstract = "We investigated photonic crystals based dual nano-ring channel drop filters which are nanomechanically tunable. The backward channel drop mechanism is explained by a proposed model. Resonant peak observed on the free stand device is located 1553.6 nm with quality factor better than 3800 at backward drop port. When this dual nano-ring is integrated at the junction between silicon cantilever and substrate, the deformation of silicon cantilever can shift the filter resonant wavelength. The 1nm wavelength shift is derived by minimum tuning force of 370nN.",

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Li, B, Hsiao, FL & Lee, C 2010, Dependence of resonant wavelength and mechanical deformation of photonic crystal cantilever integrated with dual nano-ring resonator. 於 2010 Photonics Global Conference, PGC 2010., 5705971, 2010 Photonics Global Conference, PGC 2010, 2010 Photonics Global Conference, PGC 2010, Orchard, Singapore, 10-12-14. https://doi.org/10.1109/PGC.2010.5705971

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