Configuration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator

Bo Li, Fu Li Hsiao, Chengkuo Lee

研究成果: Article同行評審

28 引文 斯高帕斯(Scopus)

摘要

Photonic crystal (PhC) based channel drop filters including two hexagonal rings in a two dimensional (2-D) photonic crystal silicon slab of hexagonal lattice are integrated on microcantilevers for nanoelectromechanical systems (NEMS) sensor applications. The proposed two hexagonal rings are named as dual nano-ring (DNR) resonator. The sensing characteristics of dual nano-ring (DNR) resonator at various positions adjacent to the junction of the microcantilever and the substrate are investigated. The derived quality factors is over 3000, and the minimum detectable force can be as small as 7.58 nN. Moreover, the continuous wave field distribution modeling is deployed to explain the origins of resonant mechanisms occurred in deformed DNR resonator under various applied forces.

原文English
頁(從 - 到)352-361
頁數10
期刊Sensors and Actuators, A: Physical
169
發行號2
DOIs
出版狀態Published - 2011 十月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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