Compliant scanning micromirror actuated with a displacement amplification mechanism

Tzung-Ming Chen, Florian Schneider, Ulrike Wallrabe

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.

原文English
主出版物標題2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
頁面127-128
頁數2
DOIs
出版狀態Published - 2010 十二月 1
事件2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
持續時間: 2010 八月 92010 八月 12

Other

Other2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
國家Japan
城市Sapporo
期間10-08-0910-08-12

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

指紋 深入研究「Compliant scanning micromirror actuated with a displacement amplification mechanism」主題。共同形成了獨特的指紋。

  • 引用此

    Chen, T-M., Schneider, F., & Wallrabe, U. (2010). Compliant scanning micromirror actuated with a displacement amplification mechanism. 於 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (頁 127-128). [5672150] https://doi.org/10.1109/OMEMS.2010.5672150