摘要
We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.
| 原文 | English |
|---|---|
| 主出版物標題 | 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 |
| 頁面 | 127-128 |
| 頁數 | 2 |
| DOIs | |
| 出版狀態 | Published - 2010 十二月 1 |
| 事件 | 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan 持續時間: 2010 八月 9 → 2010 八月 12 |
Other
| Other | 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 |
|---|---|
| 國家 | Japan |
| 城市 | Sapporo |
| 期間 | 10-08-09 → 10-08-12 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering
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引用此
Chen, T-M., Schneider, F., & Wallrabe, U. (2010). Compliant scanning micromirror actuated with a displacement amplification mechanism. 於 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (頁 127-128). [5672150] https://doi.org/10.1109/OMEMS.2010.5672150