Compliant scanning micromirror actuated with a displacement amplification mechanism

Tzung-Ming Chen; Florian Schneider; Ulrike Wallrabe

doi:10.1109/OMEMS.2010.5672150

Compliant scanning micromirror actuated with a displacement amplification mechanism

Tzung-Ming Chen, Florian Schneider, Ulrike Wallrabe

工業教育與技術學系

研究成果: Conference contribution

1 引文斯高帕斯（Scopus）

摘要

We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.

原文	English
主出版物標題	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
頁面	127-128
頁數	2
DOIs	https://doi.org/10.1109/OMEMS.2010.5672150
出版狀態	Published - 2010 十二月 1
事件	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan 持續時間: 2010 八月 9 → 2010 八月 12

Other

Other	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
國家	Japan
城市	Sapporo
期間	10-08-09 → 10-08-12

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

存取文件

10.1109/OMEMS.2010.5672150

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引用此

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Chen, T-M, Schneider, F & Wallrabe, U 2010, Compliant scanning micromirror actuated with a displacement amplification mechanism. 於 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672150, 頁 127-128, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, Japan, 10-08-09. https://doi.org/10.1109/OMEMS.2010.5672150

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N2 - We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.

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