Analysis of nonlinear dynamic behavior of micro circular plate actuator using hybrid numerical method

研究成果: Conference contribution

摘要

A hybrid differential transformation and finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro circular plate devices which is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. The numerical results for the pull-in voltage are found to deviate by no more than 2.09% from the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC / AC loading scheme in driving the micro circular actuator is examined. It is shown that the use of an AC actuating voltage in addition to the DC driving voltage provides an effective means of tuning the dynamic response of the micro circular plate.

原文English
主出版物標題ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers
頁面7402-7409
頁數8
出版狀態Published - 2012 十二月 1
事件6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012 - Vienna, Austria
持續時間: 2012 九月 102012 九月 14

出版系列

名字ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers

Other

Other6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012
國家Austria
城市Vienna
期間12-09-1012-09-14

All Science Journal Classification (ASJC) codes

  • Computational Theory and Mathematics
  • Applied Mathematics

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  • 引用此

    Liu, C-C. (2012). Analysis of nonlinear dynamic behavior of micro circular plate actuator using hybrid numerical method. 於 ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers (頁 7402-7409). (ECCOMAS 2012 - European Congress on Computational Methods in Applied Sciences and Engineering, e-Book Full Papers).