Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application

Shih Chang Chen, Chiang Ho Cheng, Yi Cheng Lin

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.

原文English
主出版物標題19th IEEE International Conference on Micro Electro Mechanical Systems
頁面762-765
頁數4
出版狀態Published - 2006 十月 24
事件19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
持續時間: 2006 一月 222006 一月 26

出版系列

名字Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2006
ISSN(列印)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
國家Turkey
城市Istanbul
期間06-01-2206-01-26

    指紋

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

引用此

Chen, S. C., Cheng, C. H., & Lin, Y. C. (2006). Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application. 於 19th IEEE International Conference on Micro Electro Mechanical Systems (頁 762-765). [1627911] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2006).