Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

Ming Fei Chen, Pei Hao Wang, Wen Tse Hsiao

研究成果: Article

摘要

In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.

原文English
頁(從 - 到)1203-1210
頁數8
期刊International Journal of Advanced Manufacturing Technology
104
發行號1-4
DOIs
出版狀態Published - 2019 九月 1

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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