Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

Ming-Fei Chen, Pei Hao Wang, Wen Tse Hsiao

研究成果: Article


In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.


All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering