A simple method for measuring the small displacements

Kun Huang Chen, Jing Heng Chen, Kun Tsan Chen, Her Lin Chiueh, Jiun You Lin, Nung Yu Wu

研究成果: Conference contribution

摘要

In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- andp- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.

原文English
主出版物標題Interferometry XIV
主出版物子標題Applications
DOIs
出版狀態Published - 2008 十月 1
事件Interferometry XIV: Applications - San Diego, CA, United States
持續時間: 2008 八月 132008 八月 14

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
7064
ISSN(列印)0277-786X

Other

OtherInterferometry XIV: Applications
國家United States
城市San Diego, CA
期間08-08-1308-08-14

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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