A novel selective growth of nanowire on CMOS MEMS compatible gas sensor

Jiong Heng Lu, Chuen Ren Jeng, Chih-Hsiung Shen, Shu Jung Chen

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

In this paper, we proposed a new sensing mechanism which the sensing structure with zinc oxide (ZnO) nanowires to increase sensitivity. The ZnO nanowires are grown selectively on top of the sensing membrane with proposed ring-type electrodes which is implemented using 0.35μm CMOS MEMS process. The ZnO nanowire is achieved by chemical bath deposition (CBD) method with several prepared solutions, zinc acetate dihydrate and hexamethylenetetramine mixed at Zn(CH3COO)2·2H2O C6H 12N4=11, the others is zinc nitrate hexahydrate and hexamethylenetetramine mixed at Zn(NO3)2× 6H 2O C6H12N4=51. The growth of nanowires reveals a novel selective deposition on the metal layers of sensing area other than the passivation of Si3N4 which means a high specific definition of sensing region beyond the conventional sol-gel method. The research on selective growth of nanowire benefits the deposition of sensing material on certain active regions beyond the drawback of conventional sol-gel deposition. The advantages of the sensor are low cost and suitable for industrial production.

原文English
主出版物標題IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013
發行者IEEE Computer Society
頁面70-73
頁數4
ISBN(列印)9781479933877
DOIs
出版狀態Published - 2013 一月 1
事件2013 IEEE 8th Nanotechnology Materials and Devices Conference, IEEE NMDC 2013 - Tainan, Taiwan
持續時間: 2013 十月 62013 十月 9

Other

Other2013 IEEE 8th Nanotechnology Materials and Devices Conference, IEEE NMDC 2013
國家Taiwan
城市Tainan
期間13-10-0613-10-09

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials

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