A novel micromechanical resonator using two-dimensional phononic crystal slab

Nan Wang, Fu Li Hsiao, Moorthi Palaniapan, J. M. Tsai, B. W. Soon, Dim Lee Kwong, Chengkuo Lee

研究成果: Conference contribution

摘要

Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the interdigital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.

原文English
主出版物標題NEMS/MEMS Technology and Devices
頁面195-198
頁數4
DOIs
出版狀態Published - 2011 七月 12
事件International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec, Singapore
持續時間: 2011 六月 262011 七月 1

出版系列

名字Advanced Materials Research
254
ISSN(列印)1022-6680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS
國家Singapore
城市Suntec
期間11-06-2611-07-01

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • 引用此

    Wang, N., Hsiao, F. L., Palaniapan, M., Tsai, J. M., Soon, B. W., Kwong, D. L., & Lee, C. (2011). A novel micromechanical resonator using two-dimensional phononic crystal slab. 於 NEMS/MEMS Technology and Devices (頁 195-198). (Advanced Materials Research; 卷 254). https://doi.org/10.4028/www.scientific.net/AMR.254.195