A new hybrid method for H2-sensitive devices using WO 3-based film and ACF interconnect

Li Min Kuo, Yu Tai Shih, Cen Shawn Wu, Yu Chi Lin, Shuchi Chao

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

A new hybrid integration method has been reported for process simplification of conventional metal-oxide sensors with a gold (Au) dopant-like catalyst during hydrogen sulfide (H2S) gas detections at room temperature. Different from conventional fabrications, an anisotropic conduction film (ACF) followed by a sputtered tungsten oxide (WO3) film tapped on Cu electrodes has been utilized in consumer applications. The process steps were reduced without compromising electrical performances. The treated ACF with a thin WO3 film, coated across two closely spaced microelectrodes is employed as the H2S solid-state sensor at room temperature. Apart from exhibiting good interconnects as conductive bumps, Au dopant-like catalyst within ACF will also produce a lower barrier between the bands of electronics, and therefore improve the electrical conductivity significantly. Our integration method offers a number of merits, including high sensitivity to the reference gas, lead-free bonding connection, low-temperature fabrication, high throughput and less fabrication time.

原文English
文章編號075105
期刊Measurement Science and Technology
24
發行號7
DOIs
出版狀態Published - 2013 七月

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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