A new approach of thermal type microsensor with photonic crystal

Po Hao Hsu, Meng Hung Tsai, Chih-Hsiung Shen, Shu Jung Chen

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

A new idea of improving complementary metal-oxidesemiconductor (CMOS) thermopile performance is introduced to increase the absorption of infrared radiation by leading the photonic crystal (PC) into thermopile in this paper. A highly sensitive infrared detector requires an excellent signal induced by incident IR radiation to maximize the temperature change. A photonic crystal structure offers significantly effect for absorption of infrared radiation. Firstly we develop such a structure of thermopile with high performance by using 0.35μm 2P4M CMOS IC compatible process which can be easily and exactly fabricated. Several designs of infrared microsensors are proposed to study influential parameters from photonic crystal structure. The measurement results show these devices get greatly responses higher than the thermopile without photonic crystal. To that end, an optimal parameter is acquired at the same time. Our design is proved to be adequate for commercial batch production.

原文English
主出版物標題2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings
頁面283-286
頁數4
DOIs
出版狀態Published - 2010 十月 18
事件2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Austin, TX, United States
持續時間: 2010 五月 32010 五月 6

出版系列

名字2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings

Other

Other2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010
國家United States
城市Austin, TX
期間10-05-0310-05-06

All Science Journal Classification (ASJC) codes

  • Instrumentation

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  • 引用此

    Hsu, P. H., Tsai, M. H., Shen, C-H., & Chen, S. J. (2010). A new approach of thermal type microsensor with photonic crystal. 於 2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings (頁 283-286). [5488063] (2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings). https://doi.org/10.1109/IMTC.2010.5488063