A new approach of 2d CMOS thermal-bubble-based accelerometer

Yin Ting Yang, Shu Jong Chen, Wei Te Lin, Wei Hong Tu, Chun An Huang, Wen Ling Liu, Chih Hsiung Shen

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

A novel thermal-bubble-based micro machined accelerometer with advantages of low solid thermal conductance and high sensitivity is presented in this paper. With our proposed micro-link structure, a new accelerometer was built with a micro heater, two pairs of thermopiles which were floating over an etched cavity. The micro-heater is centered on the membrane and two pairs of thermopiles besides are crossed with each other. The heater and the thermopiles are connected by network structure of micro-links, which enhance the structure and greatly reduce the solid heat flow from the heater to the hot junctions of thermopiles. Furthermore, the samples are fabricated by TSMC 0.35μm 2P4M CMOS process which is provided by CIC with outstanding strong structures and uniform quality. Our design is proved to be adequate for commercial batch production.

原文English
主出版物標題Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
頁面2980-2984
頁數5
DOIs
出版狀態Published - 2007 十二月 1
事件33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan
持續時間: 2007 十一月 52007 十一月 8

出版系列

名字IECON Proceedings (Industrial Electronics Conference)

Other

Other33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
國家Taiwan
城市Taipei
期間07-11-0507-11-08

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • 引用此

    Yang, Y. T., Chen, S. J., Lin, W. T., Tu, W. H., Huang, C. A., Liu, W. L., & Shen, C. H. (2007). A new approach of 2d CMOS thermal-bubble-based accelerometer. 於 Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON (頁 2980-2984). [4460215] (IECON Proceedings (Industrial Electronics Conference)). https://doi.org/10.1109/IECON.2007.4460215