Abstract
Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.
Original language | English |
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Pages (from-to) | C6O56-C6O59 |
Journal | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics |
Volume | 28 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2010 Nov |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry