Abstract
Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.
| Original language | English |
|---|---|
| Pages (from-to) | C6O56-C6O59 |
| Journal | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics |
| Volume | 28 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2010 Nov |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry
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Waveguide-plasmon resonances in gold-capped silicon-nitride disk photonic crystal slabs. / Shyu, Jia Hong; Lee, Huang Ming; Chien, Jui Hsing; Wu, Jong Ching.
In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 28, No. 6, 11.2010, p. C6O56-C6O59.Research output: Contribution to journal › Article
TY - JOUR
T1 - Waveguide-plasmon resonances in gold-capped silicon-nitride disk photonic crystal slabs
AU - Shyu, Jia Hong
AU - Lee, Huang Ming
AU - Chien, Jui Hsing
AU - Wu, Jong Ching
PY - 2010/11
Y1 - 2010/11
N2 - Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.
AB - Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.
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U2 - 10.1116/1.3518460
DO - 10.1116/1.3518460
M3 - Article
AN - SCOPUS:78650083546
VL - 28
SP - C6O56-C6O59
JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SN - 2166-2746
IS - 6
ER -