Waveguide-plasmon resonances in gold-capped silicon-nitride disk photonic crystal slabs

Jia Hong Shyu, Huang Ming Lee, Jui Hsing Chien, Jong Ching Wu

Research output: Contribution to journalArticle

Abstract

Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.

Original languageEnglish
Pages (from-to)C6O56-C6O59
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume28
Issue number6
DOIs
Publication statusPublished - 2010 Nov

Fingerprint

Photonic crystals
Silicon nitride
silicon nitrides
Gold
slabs
Waveguides
photonics
gold
waveguides
crystals
silicon nitride
membranes
Membranes
Opacity
Light transmission
transmittance
finite element method
Finite element method

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

@article{bc267b6273f2485388ab6437a479b311,
title = "Waveguide-plasmon resonances in gold-capped silicon-nitride disk photonic crystal slabs",
abstract = "Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.",
author = "Shyu, {Jia Hong} and Lee, {Huang Ming} and Chien, {Jui Hsing} and Wu, {Jong Ching}",
year = "2010",
month = "11",
doi = "10.1116/1.3518460",
language = "English",
volume = "28",
pages = "C6O56--C6O59",
journal = "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
number = "6",

}

Waveguide-plasmon resonances in gold-capped silicon-nitride disk photonic crystal slabs. / Shyu, Jia Hong; Lee, Huang Ming; Chien, Jui Hsing; Wu, Jong Ching.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 28, No. 6, 11.2010, p. C6O56-C6O59.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Waveguide-plasmon resonances in gold-capped silicon-nitride disk photonic crystal slabs

AU - Shyu, Jia Hong

AU - Lee, Huang Ming

AU - Chien, Jui Hsing

AU - Wu, Jong Ching

PY - 2010/11

Y1 - 2010/11

N2 - Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.

AB - Waveguide-plasmon resonances of gold-capped silicon-nitride (SiN) disk photonic crystal slabs (PCSs) were investigated experimentally and numerically. The waveguide couplings were supported by the freestanding SiN membrane and the SiN-disk PCS. A tunable waveguide-plasmon resonance was modified by the SiN-disk height. When the SiN-disk height increased, the waveguide-plasmon resonances were enhanced and were blueshifted in optical-transmission spectra. The SiN-disk PCS was also fabricated to distinguish the presence of the waveguide-plasmon resonance in the gold-capped SiN-disk PCS from the guided resonance in the SiN-disk PCS. The finite-element method was used to calculate the optical transmittance of the gold disk array-coated SiN membranes, the gold-capped SiN-disk PCSs, and the SiN-disk PCSs. They were all in good agreement with the experiments.

UR - http://www.scopus.com/inward/record.url?scp=78650083546&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78650083546&partnerID=8YFLogxK

U2 - 10.1116/1.3518460

DO - 10.1116/1.3518460

M3 - Article

AN - SCOPUS:78650083546

VL - 28

SP - C6O56-C6O59

JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

SN - 2166-2746

IS - 6

ER -