Abstract
This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.
| Original language | English |
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| Title of host publication | 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
| Pages | 729-732 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2012 Jun 1 |
| Event | 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan Duration: 2012 Mar 5 → 2012 Mar 8 |
Publication series
| Name | 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
|---|
Other
| Other | 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
|---|---|
| Country | Japan |
| City | Kyoto |
| Period | 12-03-05 → 12-03-08 |
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All Science Journal Classification (ASJC) codes
- Engineering (miscellaneous)
Cite this
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Using a Canny-edge-detection based method to characterize in-plane micro-actuators. / Cheng, Chao Yu; Lin, Yan Bo; Wang, Kerwin.
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 729-732 6196878 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Using a Canny-edge-detection based method to characterize in-plane micro-actuators
AU - Cheng, Chao Yu
AU - Lin, Yan Bo
AU - Wang, Kerwin
PY - 2012/6/1
Y1 - 2012/6/1
N2 - This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.
AB - This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.
UR - http://www.scopus.com/inward/record.url?scp=84861535313&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861535313&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2012.6196878
DO - 10.1109/NEMS.2012.6196878
M3 - Conference contribution
AN - SCOPUS:84861535313
SN - 9781467311243
T3 - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
SP - 729
EP - 732
BT - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
ER -