Using a Canny-edge-detection based method to characterize in-plane micro-actuators

Chao Yu Cheng; Yan Bo Lin; Kerwin Wang

doi:10.1109/NEMS.2012.6196878

Using a Canny-edge-detection based method to characterize in-plane micro-actuators

Chao Yu Cheng, Yan Bo Lin, Kerwin Wang

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.

Original language	English
Title of host publication	2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages	729-732
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2012.6196878
Publication status	Published - 2012 Jun 1
Event	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan Duration: 2012 Mar 5 → 2012 Mar 8

Publication series

Name	2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Other

Other	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Country	Japan
City	Kyoto
Period	12-03-05 → 12-03-08

All Science Journal Classification (ASJC) codes

Engineering (miscellaneous)

Access to Document

10.1109/NEMS.2012.6196878

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Cheng, C. Y., Lin, Y. B., & Wang, K. (2012). Using a Canny-edge-detection based method to characterize in-plane micro-actuators. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (pp. 729-732). [6196878] (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196878

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title = "Using a Canny-edge-detection based method to characterize in-plane micro-actuators",

abstract = "This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.",

author = "Cheng, {Chao Yu} and Lin, {Yan Bo} and Kerwin Wang",

year = "2012",

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doi = "10.1109/NEMS.2012.6196878",

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booktitle = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",

note = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 ; Conference date: 05-03-2012 Through 08-03-2012",

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Cheng, CY, Lin, YB & Wang, K 2012, Using a Canny-edge-detection based method to characterize in-plane micro-actuators. in 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012., 6196878, 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, pp. 729-732, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, 12-03-05. https://doi.org/10.1109/NEMS.2012.6196878

Using a Canny-edge-detection based method to characterize in-plane micro-actuators. / Cheng, Chao Yu; Lin, Yan Bo; Wang, Kerwin.

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 729-732 6196878 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.

AB - This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.

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Cheng CY, Lin YB, Wang K. Using a Canny-edge-detection based method to characterize in-plane micro-actuators. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 729-732. 6196878. (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196878