Using a Canny-edge-detection based method to characterize in-plane micro-actuators

Chao Yu Cheng, Yan Bo Lin, Kerwin Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46μm/pixel.

Original languageEnglish
Title of host publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages729-732
Number of pages4
DOIs
Publication statusPublished - 2012 Jun 1
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
Duration: 2012 Mar 52012 Mar 8

Publication series

Name2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Other

Other7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
CountryJapan
CityKyoto
Period12-03-0512-03-08

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

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    Cheng, C. Y., Lin, Y. B., & Wang, K. (2012). Using a Canny-edge-detection based method to characterize in-plane micro-actuators. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (pp. 729-732). [6196878] (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196878