Tuning the formation of p-type defects by peroxidation of CuAlO2 films

Jie Luo, Yow Jon Lin, Hao Che Hung, Chia Jyi Liu, Yao Wei Yang

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


p-type conduction of CuAlO2 thin films was realized by the rf sputtering method. Combining with Hall, X-ray photoelectron spectroscopy, energy dispersive spectrometer, and X-ray diffraction results, a direct link between the hole concentration, Cu vacancy (VCu), and interstitial oxygen (Oi) was established. It is shown that peroxidation of CuAlO 2 films may lead to the increased formation probability of acceptors (VCu and Oi), thus, increasing the hole concentration. The dependence of the VCu density on growth conditions was identified for providing a guide to tune the formation of p-type defects in CuAlO 2. Understanding the defect-related p-type conductivity of CuAlO 2 is essential for designing optoelectronic devices and improving their performance.

Original languageEnglish
Article number033712
JournalJournal of Applied Physics
Issue number3
Publication statusPublished - 2013 Jul 21

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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