Topology optimization for micro rotational mirror design and safe manufacturing

Tzung-Ming Chen; Z. Liu; J. G. Korvinke; S. Kraussel; U. Wallrabe

doi:10.1109/MEMSYS.2009.4805559

Topology optimization for micro rotational mirror design and safe manufacturing

Tzung-Ming Chen, Z. Liu, J. G. Korvinke, S. Kraussel, U. Wallrabe

Department of Industrial Education and Technology

Research output: Contribution to journal › Conference article

5 Citations (Scopus)

Abstract

We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.

Original language	English
Article number	4805559
Pages (from-to)	1019-1022
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805559
Publication status	Published - 2009 Jun 1
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Chen, T-M., Liu, Z., Korvinke, J. G., Kraussel, S., & Wallrabe, U. (2009). Topology optimization for micro rotational mirror design and safe manufacturing. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1019-1022. [4805559]. https://doi.org/10.1109/MEMSYS.2009.4805559

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10.1109/MEMSYS.2009.4805559