Abstract
We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.
Original language | English |
---|---|
Article number | 4805559 |
Pages (from-to) | 1019-1022 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
Publication status | Published - 2009 |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering