Topology optimization for micro rotational mirror design and safe manufacturing

Tzung-Ming Chen, Z. Liu, J. G. Korvinke, S. Kraussel, U. Wallrabe

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.

Original languageEnglish
Article number4805559
Pages (from-to)1019-1022
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

Fingerprint

Shape optimization
Compliant mechanisms
Mirrors
topology
manufacturing
Silicon
mirrors
optimization
Single crystals
Structural optimization
piezoelectric actuators
Piezoelectric actuators
single crystals
silicon
rigid structures
microelectromechanical systems
MEMS
low frequencies
output

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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Topology optimization for micro rotational mirror design and safe manufacturing. / Chen, Tzung-Ming; Liu, Z.; Korvinke, J. G.; Kraussel, S.; Wallrabe, U.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 01.06.2009, p. 1019-1022.

Research output: Contribution to journalConference article

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