Topology optimization for micro rotational mirror design and safe manufacturing

T. Chen; Z. Liu; J. G. Korvinke; S. Kraussel; U. Wallrabe

doi:10.1109/MEMSYS.2009.4805559

Topology optimization for micro rotational mirror design and safe manufacturing

T. Chen, Z. Liu, J. G. Korvinke, S. Kraussel, U. Wallrabe

Department of Industrial Education and Technology

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.

Original language	English
Article number	4805559
Pages (from-to)	1019-1022
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805559
Publication status	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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title = "Topology optimization for micro rotational mirror design and safe manufacturing",

abstract = "We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.",

author = "T. Chen and Z. Liu and Korvinke, {J. G.} and S. Kraussel and U. Wallrabe",

year = "2009",

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journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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AU - Liu, Z.

AU - Korvinke, J. G.

AU - Kraussel, S.

AU - Wallrabe, U.

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AB - We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.

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