Topology optimization for micro rotational mirror design and safe manufacturing

Tzung-Ming Chen, Z. Liu, J. G. Korvinke, S. Kraussel, U. Wallrabe

Research output: Contribution to journalConference article

5 Citations (Scopus)


We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.

Original languageEnglish
Article number4805559
Pages (from-to)1019-1022
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this