Abstract
We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.
| Original language | English |
|---|---|
| Article number | 4805559 |
| Pages (from-to) | 1019-1022 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| DOIs | |
| Publication status | Published - 2009 Jun 1 |
| Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Chen, T-M., Liu, Z., Korvinke, J. G., Kraussel, S., & Wallrabe, U. (2009). Topology optimization for micro rotational mirror design and safe manufacturing. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1019-1022. [4805559]. https://doi.org/10.1109/MEMSYS.2009.4805559