Abstract
This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.
| Original language | English |
|---|---|
| Title of host publication | CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics |
| Subtitle of host publication | Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Number of pages | 1 |
| ISBN (Electronic) | 0780377664 |
| DOIs | |
| Publication status | Published - 2003 Jan 1 |
| Event | 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19 |
Publication series
| Name | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest |
|---|---|
| Volume | 1 |
Other
| Other | 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 |
|---|---|
| Country | Taiwan |
| City | Taipei |
| Period | 03-12-15 → 03-12-19 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
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Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. / Wang, Kerwin; Böhringer, Karl F.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1274774 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays
AU - Wang, Kerwin
AU - Böhringer, Karl F.
PY - 2003/1/1
Y1 - 2003/1/1
N2 - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.
AB - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.
UR - http://www.scopus.com/inward/record.url?scp=17444413265&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=17444413265&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2003.1274774
DO - 10.1109/CLEOPR.2003.1274774
M3 - Conference contribution
AN - SCOPUS:17444413265
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
PB - Institute of Electrical and Electronics Engineers Inc.
ER -