Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays

Kerwin Wang, Karl F. Böhringer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

Original languageEnglish
Title of host publicationCLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publicationPhotonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages1
Volume1
ISBN (Electronic)0780377664
DOIs
Publication statusPublished - 2003 Jan 1
Event5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
Duration: 2003 Dec 152003 Dec 19

Other

Other5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
CountryTaiwan
CityTaipei
Period03-12-1503-12-19

Fingerprint

Plasma etching
plasma etching
numerical aperture
Etching
spacing
etching

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Wang, K., & Böhringer, K. F. (2003). Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings (Vol. 1). [1274774] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274774
Wang, Kerwin ; Böhringer, Karl F. / Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003.
@inproceedings{92ef2da76e6d48c28c4b9154edc73d23,
title = "Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays",
abstract = "This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.",
author = "Kerwin Wang and B{\"o}hringer, {Karl F.}",
year = "2003",
month = "1",
day = "1",
doi = "10.1109/CLEOPR.2003.1274774",
language = "English",
volume = "1",
booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",

}

Wang, K & Böhringer, KF 2003, Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. vol. 1, 1274774, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 03-12-15. https://doi.org/10.1109/CLEOPR.2003.1274774

Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. / Wang, Kerwin; Böhringer, Karl F.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. 1274774.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays

AU - Wang, Kerwin

AU - Böhringer, Karl F.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

AB - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

UR - http://www.scopus.com/inward/record.url?scp=17444413265&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=17444413265&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2003.1274774

DO - 10.1109/CLEOPR.2003.1274774

M3 - Conference contribution

AN - SCOPUS:17444413265

VL - 1

BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Wang K, Böhringer KF. Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2003. 1274774 https://doi.org/10.1109/CLEOPR.2003.1274774