@inproceedings{92ef2da76e6d48c28c4b9154edc73d23,
title = "Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays",
abstract = "This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.",
author = "Kerwin Wang and B{\"o}hringer, {Karl F.}",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/CLEOPR.2003.1274774",
language = "English",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",
address = "United States",
note = "5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",
}