Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays

Kerwin Wang; Karl F. Böhringer

doi:10.1109/CLEOPR.2003.1274774

Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays

Kerwin Wang, Karl F. Böhringer

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1274774
Publication status	Published - 2003 Jan 1
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	1

Other

Other	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country	Taiwan
City	Taipei
Period	03-12-15 → 03-12-19

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2003.1274774

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Cite this

Wang, K., & Böhringer, K. F. (2003). Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1274774] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274774

Wang, Kerwin ; Böhringer, Karl F. / Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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abstract = "This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.",

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doi = "10.1109/CLEOPR.2003.1274774",

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Wang, K & Böhringer, KF 2003, Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1274774, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 1, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 03-12-15. https://doi.org/10.1109/CLEOPR.2003.1274774

Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. / Wang, Kerwin; Böhringer, Karl F.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1274774 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

AB - This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.

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Wang K, Böhringer KF. Time-multiplexed plasma-etching of high numerical aperture paraboloidal micromirror arrays. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1274774. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2003.1274774