In this paper, a new flexible hinge (FH) positioning monolithic stage has been designed to cooperate with Piezoelectric (PZT) actuator for ultra-fine position application. To improve the dynamic characterization of the stage in positioning, the leaf type and notch type springs are considered. The Castigliano theorem and Lagrange's equation are applied and dynamic characterization of the stage is obtained. Taguchi Orthogonal Array Table (L9) is performed to design the finite element numerical simulations by ANSYS. Analysis of Variance (ANOVA) with additive model confirms the optimal geometry parameters of FH stage thereof. When the stage is constrained, theoretical result of natural frequency is 14% different from ANSYS result. With free-free boundary, experimental mode shapes of the initial six natural frequencies are under 3% variation with ANSYS results. Design FH stage has been proposed to establish a new micro positioning stage achieving better dynamic characterization.
|Number of pages||8|
|Journal||Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao|
|Publication status||Published - 2012 Feb 1|
All Science Journal Classification (ASJC) codes
- Mechanical Engineering