The vibration problem studying in micro actuator system using the differential transformation method

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The aim of this study is to derive the governing equation of an electrostatically actuated micro system by use of the Hamilton principle, and then the natural frequencies of a micro fixed-fixed beam are derived as the solutions to a boundary value problem with prescribed boundary conditions through the differential transformation method (D.T.M.). The differential transformation employed is a transformed function based on the Taylor series that is effective in solving nonlinear problems with fast convergence. The numerical results of the calculated natural frequencies are compared with the analytical data and were found to be in good agreement. Hence, the differential transformation method is one of the most efficient methods of simulating the electrostatic behavior of a micro-structure system, and it has a great potential for use in the analysis of the micro fixed-fixed beam.

Original languageEnglish
Title of host publicationInnovation for Applied Science and Technology
Pages1966-1970
Number of pages5
DOIs
Publication statusPublished - 2013 Feb 20
Event2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
Duration: 2012 Nov 22012 Nov 6

Publication series

NameApplied Mechanics and Materials
Volume284-287
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
CountryTaiwan
CityKaohsiung
Period12-11-0212-11-06

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'The vibration problem studying in micro actuator system using the differential transformation method'. Together they form a unique fingerprint.

  • Cite this

    Liu, C-C., & Chen, M-F. (2013). The vibration problem studying in micro actuator system using the differential transformation method. In Innovation for Applied Science and Technology (pp. 1966-1970). (Applied Mechanics and Materials; Vol. 284-287). https://doi.org/10.4028/www.scientific.net/AMM.284-287.1966