The vibration problem studying in micro actuator system using the differential transformation method

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The aim of this study is to derive the governing equation of an electrostatically actuated micro system by use of the Hamilton principle, and then the natural frequencies of a micro fixed-fixed beam are derived as the solutions to a boundary value problem with prescribed boundary conditions through the differential transformation method (D.T.M.). The differential transformation employed is a transformed function based on the Taylor series that is effective in solving nonlinear problems with fast convergence. The numerical results of the calculated natural frequencies are compared with the analytical data and were found to be in good agreement. Hence, the differential transformation method is one of the most efficient methods of simulating the electrostatic behavior of a micro-structure system, and it has a great potential for use in the analysis of the micro fixed-fixed beam.

Original languageEnglish
Title of host publicationInnovation for Applied Science and Technology
Pages1966-1970
Number of pages5
DOIs
Publication statusPublished - 2013 Feb 20
Event2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
Duration: 2012 Nov 22012 Nov 6

Publication series

NameApplied Mechanics and Materials
Volume284-287
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
CountryTaiwan
CityKaohsiung
Period12-11-0212-11-06

Fingerprint

Natural frequencies
Actuators
Taylor series
Boundary value problems
Electrostatics
Boundary conditions
Microstructure

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Liu, C-C., & Chen, M-F. (2013). The vibration problem studying in micro actuator system using the differential transformation method. In Innovation for Applied Science and Technology (pp. 1966-1970). (Applied Mechanics and Materials; Vol. 284-287). https://doi.org/10.4028/www.scientific.net/AMM.284-287.1966
Liu, Chin-Chia ; Chen, Ming-Fei. / The vibration problem studying in micro actuator system using the differential transformation method. Innovation for Applied Science and Technology. 2013. pp. 1966-1970 (Applied Mechanics and Materials).
@inproceedings{5257a24044034737a1782f5ff46d2ceb,
title = "The vibration problem studying in micro actuator system using the differential transformation method",
abstract = "The aim of this study is to derive the governing equation of an electrostatically actuated micro system by use of the Hamilton principle, and then the natural frequencies of a micro fixed-fixed beam are derived as the solutions to a boundary value problem with prescribed boundary conditions through the differential transformation method (D.T.M.). The differential transformation employed is a transformed function based on the Taylor series that is effective in solving nonlinear problems with fast convergence. The numerical results of the calculated natural frequencies are compared with the analytical data and were found to be in good agreement. Hence, the differential transformation method is one of the most efficient methods of simulating the electrostatic behavior of a micro-structure system, and it has a great potential for use in the analysis of the micro fixed-fixed beam.",
author = "Chin-Chia Liu and Ming-Fei Chen",
year = "2013",
month = "2",
day = "20",
doi = "10.4028/www.scientific.net/AMM.284-287.1966",
language = "English",
isbn = "9783037856123",
series = "Applied Mechanics and Materials",
pages = "1966--1970",
booktitle = "Innovation for Applied Science and Technology",

}

Liu, C-C & Chen, M-F 2013, The vibration problem studying in micro actuator system using the differential transformation method. in Innovation for Applied Science and Technology. Applied Mechanics and Materials, vol. 284-287, pp. 1966-1970, 2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012, Kaohsiung, Taiwan, 12-11-02. https://doi.org/10.4028/www.scientific.net/AMM.284-287.1966

The vibration problem studying in micro actuator system using the differential transformation method. / Liu, Chin-Chia; Chen, Ming-Fei.

Innovation for Applied Science and Technology. 2013. p. 1966-1970 (Applied Mechanics and Materials; Vol. 284-287).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - The vibration problem studying in micro actuator system using the differential transformation method

AU - Liu, Chin-Chia

AU - Chen, Ming-Fei

PY - 2013/2/20

Y1 - 2013/2/20

N2 - The aim of this study is to derive the governing equation of an electrostatically actuated micro system by use of the Hamilton principle, and then the natural frequencies of a micro fixed-fixed beam are derived as the solutions to a boundary value problem with prescribed boundary conditions through the differential transformation method (D.T.M.). The differential transformation employed is a transformed function based on the Taylor series that is effective in solving nonlinear problems with fast convergence. The numerical results of the calculated natural frequencies are compared with the analytical data and were found to be in good agreement. Hence, the differential transformation method is one of the most efficient methods of simulating the electrostatic behavior of a micro-structure system, and it has a great potential for use in the analysis of the micro fixed-fixed beam.

AB - The aim of this study is to derive the governing equation of an electrostatically actuated micro system by use of the Hamilton principle, and then the natural frequencies of a micro fixed-fixed beam are derived as the solutions to a boundary value problem with prescribed boundary conditions through the differential transformation method (D.T.M.). The differential transformation employed is a transformed function based on the Taylor series that is effective in solving nonlinear problems with fast convergence. The numerical results of the calculated natural frequencies are compared with the analytical data and were found to be in good agreement. Hence, the differential transformation method is one of the most efficient methods of simulating the electrostatic behavior of a micro-structure system, and it has a great potential for use in the analysis of the micro fixed-fixed beam.

UR - http://www.scopus.com/inward/record.url?scp=84873886897&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84873886897&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMM.284-287.1966

DO - 10.4028/www.scientific.net/AMM.284-287.1966

M3 - Conference contribution

SN - 9783037856123

T3 - Applied Mechanics and Materials

SP - 1966

EP - 1970

BT - Innovation for Applied Science and Technology

ER -